6 février 2020 Caroline

First international workshop dedicated to Plasma Cryogenic Etching Processes

PlaCEP 2020 May 5-7, 2020 – Orléans, France

PlaCEP 2020 aims at gathering researchers and engineers working, or interested in cryogenicetching and share knowledge as well as experience in this very specific field.

Scientific Topics

  • Cryogenic etching processes of silicon and other materials (low-K, …)
  • Modelling and simulation of cryogenic processes
  • Passivation layer growth and surface mechanisms at cryogenic temperature
  • Cryo-Atomic Layer etching
  • Black silicon formation
  • Cryogenic related technology

About the Author

Caroline Webmaster du site web Renatech

< retour à la liste