PlaCEP 2020 May 5-7, 2020 – Orléans, France
PlaCEP 2020 aims at gathering researchers and engineers working, or interested in cryogenicetching and share knowledge as well as experience in this very specific field.
Scientific Topics
- Cryogenic etching processes of silicon and other materials (low-K, …)
- Modelling and simulation of cryogenic processes
- Passivation layer growth and surface mechanisms at cryogenic temperature
- Cryo-Atomic Layer etching
- Black silicon formation
- Cryogenic related technology
